brands/Parker Veriflo
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Parker's Veriflo Division is a global leader in the design and manufacture of precision fluid control components and systems for the semiconductor industry. Their products are used in critical applications where accuracy, reliability, and cleanliness are essential. With over 100 years of experience, Veriflo offers a comprehensive range of solutions, including pressure regulators, valves, fittings, and manifolds that are designed to meet the most demanding requirements of our customers.
Featured Products
ACI offers a wide variety of Parker Veriflo products that are in stock and ready to ship. Check out our featured products.
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Pressure Regulators
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High Purity Pressure Regulators
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Gas Management Change Over Systems
Learn more: Parker Veriflo TF25
The Parker Veriflo TF25 Time Fill Dispenser system is an integrated compressed natural gas (CNG) fueling system for commercial and fleet vehicles. The CNG fuel system delivers high flow rates and increased durability for minimal downtime and is fully compliant, lessening risk for CNG refueling station owners and operators. Its fill poles include the fuel hose and nozzle to provide faster CNG filling over a 6- to 14-hour period.
Veriflo's Semiconductor Applications
Bulk Gas Parker Veriflo semiconductor bulk gas distribution valves and regulators are utilized in the delivery of inert and process gases, from a wafer fab central utility building, through sub-fab ring and lateral gas distribution lines, and to final process points of use.
Parker Veriflo UHP bellows and diaphragm valves and regulators are operated in a myriad of semiconductor gas delivery applications, including:
- Bulk inert & specialty gas
- Lateral inert & specialty gas distribution
- Purifiers
- Filter, Pressure Control, Purifier Skids
- Valve Manifold Boxes (VMB) - Valve Manifold Panels (VMP)
- Process Gas Cabinets
- Process tool hook up floor modules
- High Purity Solvent systems
Gas Distribution Veriflo products are used throughout the Gas Distribution Systems of a typical Semiconductor manufacturing facility. Regulators, Valves and fittings are all used in various configurations that route gas from the source (either bulk storage or site generated) through the main lines, laterals and into process module manifolds where they are then further divided into process tools.
Parker Veriflo UHP and HP products are used in a variety of semiconductor gas delivery applications, including:
- Process Control Manifolds / “Gas Sticks”
- Valve Manifold Panels “VMPs”
- Valve Manifold Boxes “VMBs”
- Gas Cabinets
- Gas Purification Systems
- Gas Regulator panels
Gas Tool Parker Veriflo gas tool valves and regulators are uniquely designed solutions to meet the gas delivery needs of various semiconductor tool applications. Veriflo’s gas tool devices are designed closely with tool manufacturers to provide optimal performance, reliability, durability and safety. All valves and regulators are constructed from UHP grade materials to provide exceptional corrosion resistance, leak integrity and maximum cycle life.
Veriflo’s gas tool products come in a wide range of pressures, flow capacities and end connections to cover all tool application needs, including:
- Corrosive and specialty gases - Semiconductor tools - Point-of-use - Gas control panels - Tool hook-ups - Gas cabinet - VMB - Low pressure and low flow
Advantages of Parker Veriflo's BDV Series
- Designed for high-flow, low-pressure conditions
- Operating pressure from vacuum to 300 psig (0-21 barg)
- 316L stainless steel body assembly, traceable to certifications
- Tied diaphragm provides "positive retraction"
- Assembled, tested, and packaged in a Class 100 cleanroom
- 10 micro inch Ra electropolished surface finish
- Available in both standard and lateral configurations
- Available with integrated Purge Ports
Contact us for more information and availability
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